XC-SP-200 RF GENERATOR OPERATING MANUAL(For KOREA)
XC-SP-200 RF GENERATOR(high frequency plasma power supply) (50KHZ)
Changchun Xingchuang Technology Electronics Co., Ltd.
CONTENTS
2、Brief description of working principle：
4、Installation and using adjustment steps：
（1）The layout of panel and backplane：
1、Overview
The power supply is suitable for vacuum chamber plasma discharge, medical plasma sterilization, modification, polymerization, analysis, meteorological deposition, magnetron sputtering coating and scientific research and industrial fields. The device frequency stable output power is continuously adjustable, the high-frequency radiation is small, the use is safe, the protection measures are perfect, and the utility model has the advantages of small volume, light weight and high efficiency.
2、Brief description of working principle：
This power supply adopts international high frequency switching technology and uses the most advanced switching device IC chip as the main control system. The high-frequency power output is completed by driving, amplifying and power amplifier, and then by the sampling circuit, the comparator controls the IC chip to complete the short-circuit protection, the overheat protection alarm, etc., and the external control interface switch and the output current simulation are provided. The quantity 0-5v signal can be linked with the host computer for control and protection.
1. Output frequency: 50KHZ.
2. Stable frequency output: 10-2
3. Output power: 0-1100w.
4. Maximum output voltage: ~ 006 -- 600V(load vacuum degree: 90Pa)
5. Maximum output current: ~ 2.2a (load vacuum degree: 90Pa)
6. Power supply mode: 220VAC/ city power supply (± no more than 20V)
7. Cooling mode: forced air cooling must be well ventilated.
8. Working environment temperature: -5 ° c -- +35 ° c
9. Efficiency: 95%
10. When the electrode of the user's equipment shortens, the power supply shall be provided with short-circuit protection.
11. There is an alarm interface when the plasma of the equipment is weak.
12. Size: Length380× Width200× Height133
13. Base size: 240×135
14. Net weight: 5.75Kg
4、Installation and using adjustment steps：
（1）The layout of panel and backplane：
The front and rear panels of the RF power supply are shown as below
5 |
2 |
4 |
3 |
1 |
7 |
6 |
8 |
9 |
10 |
1. Voltmeter 2. Ammeter 3. Work indicator
4. Fault alarm lamp 5. Power adjustment knob
6. High-frequency output terminal 7. Fuse
8. External control interface 9. Power interface
10. Ground terminal
Navigation pin of external control interface:
1-2. Connection (high-voltage switch)
3 -- 4. Alarm interface. When the output works normally, it is the closure point; when there is no equidistance
It is broken when the arc light is weak.
5-6. Current sampling. When the output ammeter indicates 1.6a, the 5-6 pin is about 1.6v.(5-6 pin function can be customized according to user requirements).
（2）Using method of operation
1、Connect according to the system connection diagram, the connection diagram is as follows:
2. The shell shall be connected to the security ground wire before operation. When the output line of the instrument is connected to the load, the red end is connected to the anode of the load, and the black end is connected to the cathode (shell, ground) of the load.
3. The power supply is connected to the AC/220V city power supply. Twist the power adjustment to the minimum (counterclockwise adjustment). When using the power supply for the first time, please make sure that the high voltage switch is in the position of off, and then the low voltage can be turned on.
4. Turn on low voltage: turn on the low voltage switch, the cooling fan in the power supply starts to work, and the indicator light on the low voltage switch is on, the voltage is about 3V, and the current is about 0.33a.
5. Turn on voltage: press the high voltage switch, the indicator light on the high voltage switch is on, the working indicator light is on, and the high voltage is connected.
6.Regulating the power: rotating power regulation twist clockwise slowly, voltmeter and ammeter should have an index rising at the same time, when the current is set to 0.8 A ,voltmeter is in commonly 260 v, the general load up, load of vacuum degree can be within 60-110 pa (note: use this power supply reference conditions: general sterilization equipment used in vacuum 60-110 pa, and tank of 100 liters vacuum cavity volume, the general current is set to about 1.6 A output , should be the best sterilization state), are for reference only. Then the output current can be set according to the user's needs. After the power supply works for 2 minutes and the power supply and load are stable, the output current can be set to the required value. Next time the boot does not need to adjust the power torque, directly open the high pressure.
7. Shutdown: turn off the high pressure first, and turn off the low pressure after cooling for 3 minutes.
1. The low-voltage switch cannot be opened.
Please check whether the low-voltage fuse (5A) is in good condition.
2. Press the high voltage switch but power supply has no output?
Please check whether the external control circuit is connected properly.
3. What are the problems of the power supply when the fault indicator is on?
When the fault indicator lights up, there is an alarm sound inside the chassis, and the power supply stops outputting.At this point, please first check whether the cooling fan is working normally, or whether the indoor temperature is overheating, the power needs to work in a well-ventilated place.
4. The voltmeter has a high index, and no current or very small, the load hasn’t build-up luminance?
Please check whether the output line connected between the power supply and the load , whether is connected well.Or the vacuum is not at 200P.
5. No matter how to adjust and add power, voltmeter and current representation are small and do not increase?
Please check the vacuum load for short circuit or internal power failure.
6. When the power supply is turned on, the low-voltage switch fuse is blown immediately.
The power supply has broken down, please ask professional personnel to check, or contact our factory for maintenance.
6、Cautions
1. The power supply of this power supply is AC/220V city power. When using, the minimum voltage is not allowed to be lower than 200V, and the maximum is not allowed to exceed 240V. Otherwise, the power supplywill be burnt out.
2. The power supply is forced air cooling. Please ensure that the environment is clean and well ventilated during using.
3. This power supply has an overheat fault alarm. Please ensure that the working environment temperature of the power supply does not exceed +35 °C. Once the indoor temperature exceeds +35 °C, the power supply will automatically stop working, and the power supply has an alarm prompt sound.
Changchun Xingda Electronic InstrumentFactory
Changchun Xingchuang Technology Electronics Co., Ltd.
Address: No. 193, Baota Street, Nong'an, Jilin Province
Website: www.ccxddz.com
Tel/Fax:+86-0431-83219223
E-mail: ccxddz@163.com
